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CSC Co., Ltd. is a company specialized for helping customers from coarse particle problem in Cleanroom.





RACCAR:Coarse Particle Counter
(Surface Particle Counter)


Size of the dusts which cause the problem is not 0.5μm but they are over 30μm. They cannot be counted by handy particle counter.


Have you ever felt like this? Most dusts which cause your products flaw are too big to count by handy particel counter. To find those bigger dusts you have to use the right tool: Coarse Particle Counter RACCAR

Dust over 30μm are affected by gravity. They fall slowly and accumulate on the surface. Coarse Particle Counter RACCAR can classify the particle size by ≧30μm, ≧50μm, ≧100μm, ≧150μm and ≧200μm and count the particle volume by each classification.

 


 
General Features and Outline Specifications
 Model: CS-RA004
 Classification: ≧30μm, ≧50μm, ≧100μm, ≧150μm and ≧200μm
 Classification of coarse particles' size: ≧30μm, ≧50μm, ≧100μm, ≧150μm and ≧200μm
 Count number of dusts on surface of sampling plate (4 inch silicon wafer) and classify them.
 Save image data and classified/counted data (CSV format)
 Measuring time: 10 seconds
 You can clean up sampling plates and use them agian.
  Size: 490mm x 420mm x 275mm
 Weight: ca. 21kg

Successful Examples

Measurement of fallen dusts in your environment

Coarse particles in any place can be measured by placing cleaned up silicon wafers and using RACCAR to count the dust on them. Then, you will be able to estimate how much the coarse particles may fall on your work pieces in the environment. This method is effective everywhere silicon wafer can be placed, even inside of ovens which are normally very difficult to check. This kind of method is called as “Particle test” in semiconductor industry. RACCAR enables to do such particle test in many applications and help your investigation to improve the yields in your production.


Measurement of cleanroom consumables (Stamp Test)


You can check how much dust attached on cleanroom consumables (gloves, cleansuits) by touching sampling silicon wafer and measuring by RACCAR. Cleanroom consumables are not always clean as you expect. Even if you clean up them before entering the cleanroom, your hands might have dust on them when touching the product.
 

Component


 RACCAR and PC ① USB Cable
② LAN Cable
③ AC Power Cable
④ Stage
⑤ Software CD
⑥ USB Security Key


CSC Co.,Ltd.
E-mail : info@csc-biz.com
TEL: (+81)78-252-7201