RACCAR:Coarse Particle Counter
(Surface Particle Counter)
Dusts on the surface of your products: Actual problem in clean room
Most of particle dusts in cleanroom are fallen dusts, which are the root
cause of product defects in many cases. They fall down very slowly and
accumulate on the surface. Fallen Dust Counter can classify the particle
≧30μm, ≧50μm, ≧100μm, ≧150μm and ≧200μm and count the particle volume by
Particle counter cannot count dusts on your works!!
Evaluation of fallen dust is important to reveal the root cause of your product defects.
- Classification of coarse particles' size: ≧30μm, ≧50μm, ≧100μm,
≧150μm and ≧200μm
- Counting particle volume of dust on surface
- Save image data and classification/counting data (CSV format)
- Measuring time: Several tens sec on an average
- The sampling plabe can be used many times by cleaning up
Measurement of fallen dusts in your environment
Coarse particles in any place can be measured by placing cleaned up silicon wafers and using RACCAR to count the dust on them. Then, you will be able to estimate how much the coarse particles may fall on your work pieces in the environment. This method is effective everywhere silicon wafer can be placed, even inside of ovens which are normally very difficult to check.
This kind of method is called as “Particle test” in semiconductor industry. RACCAR enables to do such particle test in many applications and help your investigation to improve the yields in your production.
Measurement of clean room consumables (Stamp Test)
You can check how much dust attached on clean room consumables by touching cleaned silicon wafer and measuring by RACCAR. Clean room consumables are not always clean as you expect. If handled carelessly, they are easily contaminated and become a root cause of surface contamination of your work.
Classification: ≧30μm, ≧50μm, ≧100μm, ≧150μm and ≧200μm
Minimum measurable particle size: 30μm
Size: 490mm x 420mm x 275mm
Weight: approx. 21kg