Classification: ≧30μm, ≧50μm, ≧100μm, ≧150μm and ≧200μm
Classification of coarse particles' size: ≧30μm, ≧50μm, ≧100μm, ≧150μm and ≧200μm
Count number of dusts on surface of sampling plate (4 inch silicon wafer) and classify them.
Save image data and classified/counted data (CSV format)
Measuring time: 10 seconds
You can clean up sampling plates and use them agian.
Size: 490mm x 420mm x 275mm
Weight: ca. 21kg
Measurement of fallen dusts in your environment
Coarse particles in any place can be measured by placing cleaned up silicon wafers and using RACCAR to count the dust on them. Then, you will be able to estimate how much the coarse particles may fall on your work pieces in the environment. This method is effective everywhere silicon wafer can be placed, even inside of ovens which are normally very difficult to check.
This kind of method is called as “Particle test” in semiconductor industry. RACCAR enables to do such particle test in many applications and help your investigation to improve the yields in your production.
Measurement of cleanroom consumables (Stamp Test)
You can check how much dust attached on cleanroom consumables (gloves,
cleansuits) by touching sampling silicon wafer and measuring by RACCAR.
Cleanroom consumables are not always clean as you expect. Even if you clean
up them before entering the cleanroom, your hands might have dust on them
when touching the product.
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