Classification: ≧30μm, ≧50μm, ≧100μm, ≧150μm and ≧200μm
Classification of coarse particles' size: ≧30μm, ≧50μm, ≧100μm, ≧150μm and ≧200μm
Count the number of dust on the sampling plate's surface (4-inch silicon wafer) and classify them.
Save image data and classified/counted data (CSV format)
Measuring time: 10 seconds
You can clean up sampling plates and use them agian.
Size: 490mm x 420mm x 275mm
Weight: ca. 21kg
Measurement of fallen dust in your environment
Coarse particles in any place can be measured by placing cleaned up silicon
wafers and using RACCAR to count the dust on them. Then, you will be able
to estimate how much the coarse particles may fall on your workpieces in
the environment. This method is effective everywhere silicon wafer can
place, even inside of ovens, usually is difficult to check. This kind of
way is called a “Particle test” in the semiconductor industry. RACCAR enables
to do such particle test in many applications and help your investigation
to improve your production yield.
Measurement of cleanroom consumables (Stamp Test)
You can check how much dust is attached on cleanroom consumables (gloves, cleansuits) by touching the sampling silicon wafer and measuring by RACCAR. Cleanroom consumables are not always clean as you expect. Even if you clean them up before entering the cleanroom, your hands might have dust on them when touching the product. Understanding the condition is the first step to an effective measurement.
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